"Microfabricated SOI pressure sensor using dynamically balanced lateral ..."

Sen Ren et al. (2014)

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DOI: 10.1109/NEMS.2014.6908797

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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Sen Ren, Weizheng Yuan, Xiaodong Sun, Jinjun Deng, Dayong Qiao, Chengyu Jiang:
Microfabricated SOI pressure sensor using dynamically balanced lateral resonator. NEMS 2014: 229-232

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