"Effect of sacrificial layer compliance on thermal stresses of composite ..."

Jin Qiu, Shawn Cunningham, Arthur Morris (2009)

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DOI: 10.1109/NEMS.2009.5068759

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Jin Qiu, Shawn Cunningham, Arthur Morris:
Effect of sacrificial layer compliance on thermal stresses of composite MEMS beams. NEMS 2009: 1073-1078

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