"The characteristics of glass deep dry etching process with a single PR mask."

Tag Gyu Park et al. (2011)

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DOI: 10.1109/NEMS.2011.6017495

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/ParkMHOS11
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Tag Gyu Park, Junggi Min, Dong-Chul Han, Yeongtaek Oh, Wonjin Seo:
The characteristics of glass deep dry etching process with a single PR mask. NEMS 2011: 885-888

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