"RF MEMS filter based on one step of copper electroplating."

Yu Liu et al. (2010)

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DOI: 10.1109/NEMS.2010.5592111

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-14

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Yu Liu, Xiuhan Li, Dong-Ming Fang, Haixia Zhang:
RF MEMS filter based on one step of copper electroplating. NEMS 2010: 945-949

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