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"Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Zhihao Li, Yunping Niu, Hao Ren (2022)

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DOI: 10.1109/NEMS54180.2022.9791180

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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Zhihao Li, Yunping Niu, Hao Ren:
Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI substrate. NEMS 2022: 330-333

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