"Atomic layer deposited protective coatings for integrated MEMS flow sensor."

Dan Li et al. (2012)

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DOI: 10.1109/NEMS.2012.6196882

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Dan Li, Aziz Abdulagatov, Fang Yang, D. C. Zhang:
Atomic layer deposited protective coatings for integrated MEMS flow sensor. NEMS 2012: 747-750

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