"Metal contact printing photolithography for fabricating sub-micrometer ..."

Yi-Ta Hsieh, Yung-Chun Lee (2012)

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DOI: 10.1109/NEMS.2012.6196718

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yi-Ta Hsieh, Yung-Chun Lee:
Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. NEMS 2012: 40-44

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