"Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices."

Fengshan Fu et al. (2015)

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DOI: 10.1109/NEMS.2015.7147499

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-09

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Fengshan Fu, Fang Yang, Wei Wang, Xian Huang, Jun He, Li Zhang, Taotao Guan, Rui Li, Dacheng Zhang:
Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices. NEMS 2015: 593-596

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