"Fabrication of a micro humidity sensor with polypyrrole using the CMOS ..."

Ching-Liang Dai, De-Hao Lu (2010)

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DOI: 10.1109/NEMS.2010.5592158

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Ching-Liang Dai, De-Hao Lu:
Fabrication of a micro humidity sensor with polypyrrole using the CMOS process. NEMS 2010: 110-113

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