"Effect of nitrogen flow ratios on microstructure and mechanical properties ..."

Chen-Kuei Chung, J. J. Jhu (2009)

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DOI: 10.1109/NEMS.2009.5068695

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Chen-Kuei Chung, J. J. Jhu:
Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. NEMS 2009: 783-786

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