"Investigation of acoustic properties and Raman scattering of AlN films for ..."

Chung-Jen Chung et al. (2011)

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DOI: 10.1109/NEMS.2011.6017431

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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Chung-Jen Chung, Po-Tsung Hsieh, Jen-Fin Lin, Cheng-Hsiang Lin, Kuo-Chih Chiu, Shean-Jen Chen, Ching-Liang Wei, Wei-Tsai Chang, Cheng-Ting Chen, Ying-Chung Chen, Kuo-Sheng Kao, Chien-Chuan Cheng:
Investigation of acoustic properties and Raman scattering of AlN films for biosensor application. NEMS 2011: 618-621

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