"Nanoscale multilayers as optical elements for X-ray photolitography."

Nikola Radic et al. (2011)

> Home

Details and statistics

DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

- view
  - electronic edition @ ieee.org
- export record
  dblp key:
  - conf/mipro/RadicSDMJDB11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/mipro/RadicSDMJDB11
Nikola Radic, Kresimir Salamon, Pavo Dubcek, Ognjen Milat, Marko Jercinovic, Goran Drazic, Sigrid Bernstorff:
Nanoscale multilayers as optical elements for X-ray photolitography. MIPRO 2011: 27-30

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.