"Two-axis scanning micro mirror device with thick film metallic glass ..."

Shigetaka Watanabe et al. (2014)

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DOI: 10.1109/MHS.2014.7006094

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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  - conf/mhs/WatanabeNJMH14
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Shigetaka Watanabe, Yutaka Nakamitsu, Sakurai Junpei, Mizue Mizojiri, Seiichi Hata:
Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. MHS 2014: 1-4

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