"MEMS components with perfectly protected edges and corners in Si{110} wafers."

Prem Pal, Kazuo Sato, Hirotaka Hida (2011)

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DOI: 10.1109/MHS.2011.6102158

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Prem Pal, Kazuo Sato, Hirotaka Hida:
MEMS components with perfectly protected edges and corners in Si{110} wafers. MHS 2011: 55-59

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