"In-situ Measurement of Residual Stress and Thermal Deformation of ..."

Cheng-Lun Kan et al. (2022)

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DOI: 10.1109/MESA55290.2022.10004403

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-26

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Cheng-Lun Kan, Han-San Xie, Chao-Ching Ho, Ching-Yuan Chang:
In-situ Measurement of Residual Stress and Thermal Deformation of Substrate after Laser Drilling. MESA 2022: 1-5

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