"Lithography aware critical area estimation and yield analysis."

Priyamvada Vijayakumar, Vikram B. Suresh, Sandip Kundu (2011)

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DOI: 10.1109/TEST.2011.6139152

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Priyamvada Vijayakumar, Vikram B. Suresh, Sandip Kundu:
Lithography aware critical area estimation and yield analysis. ITC 2011: 1-8

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