"Chasing Front-End-Of-Line Defects with Cell-Aware Diagnostics in ..."

Saghir A Shaikh et al. (2025)

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DOI: 10.1109/ITC58126.2025.00046

access: closed

type: Conference or Workshop Paper

metadata version: 2025-12-22

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Saghir A Shaikh, Brandon Brea, Gaurav Devrani, Muhammad Waheed, Lay Hoon Loh, Prakash Palanisamy, Jim Lee, Giyoung Yang:
Chasing Front-End-Of-Line Defects with Cell-Aware Diagnostics in High-Volume Manufacturing. ITC 2025: 382-386

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