"1024 3D-Stacked Monolithic NEMS Array with 375μm20.5mW ..."

Gérard Billiot et al. (2022)

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DOI: 10.1109/ISSCC42614.2022.9731729

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Gérard Billiot, Paul Mattei, Bogdan Vysotskyi, Adrien Reynaud, Louis Hutin, Christophe Plantier, Emmanuel Rolland, Marc Gely, Giulia Usai, Claude Tabone, Gaël Pillonnet, Stéphanie Robinet, Sébastien Hentz:
1024 3D-Stacked Monolithic NEMS Array with 375μm²0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing. ISSCC 2022: 1-3

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