"A Min-Variance Iterative Method for Fast Smart Dummy Feature Density ..."

Xin Wang et al. (2005)

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DOI: 10.1109/ISQED.2005.8

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Xin Wang, Charles C. Chiang, Jamil Kawa, Qing Su:
A Min-Variance Iterative Method for Fast Smart Dummy Feature Density Assignment in Chemical-Mechanical Polishing. ISQED 2005: 258-263

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