"Design technology co-optimization of back end of line design rules for a 7 ..."

Vinay Vashishtha et al. (2017)

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DOI: 10.1109/ISQED.2017.7918308

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-11

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Vinay Vashishtha, Ankita Dosi, Lovish Masand, Lawrence T. Clark:
Design technology co-optimization of back end of line design rules for a 7 nm predictive process design kit. ISQED 2017: 149-154

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