"Control of design specific variation in etch-assisted via pattern transfer ..."

Valeriy Sukharev et al. (2009)

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DOI: 10.1109/ISQED.2009.4810286

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Valeriy Sukharev, Ara Markosian, Armen Kteyan, Levon Manukyan, Nikolay Khachatryan, Jun-Ho Choy, Hasmik Lazaryan, Henrik Hovsepyan, Seiji Onoue, Takuo Kikuchi, Tetsuya Kamigaki:
Control of design specific variation in etch-assisted via pattern transfer by means of full-chip simulation. ISQED 2009: 156-161

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