"Test structure, circuits and extraction methods to determine the radius of ..."

Albert H. Chang et al. (2012)

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DOI: 10.1109/ISQED.2012.6187493

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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  - https://dblp.org/rec/conf/isqed/ChangZWYB12
Albert H. Chang, Kewei Zuo, Jean Wang, Douglas Yu, Duane S. Boning:
Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density. ISQED 2012: 185-192

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