"A Wafer-scale Manufacturing Pathway for Fine-grained Vertical 3D-IC ..."

Sachin Bhat et al. (2021)

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DOI: 10.1109/ISQED51717.2021.9424282

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-17

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  - conf/isqed/BhatGKLM21
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  - https://dblp.org/rec/conf/isqed/BhatGKLM21
Sachin Bhat, Sounak Shaun Ghosh, Sourabh Kulkarni, Mingyu Li, Csaba Andras Moritz:
A Wafer-scale Manufacturing Pathway for Fine-grained Vertical 3D-IC Technology. ISQED 2021: 228-233

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