"A Fast Lithography Verification Framework for Litho-Friendly Layout Design."

Yong-Chan Ban et al. (2005)

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DOI: 10.1109/ISQED.2005.5

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/isqed/BanCLKHKYK05
Yong-Chan Ban, Soo-Han Choi, Ki-Hung Lee, Dong-Hyun Kim, Jisuk Hong, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong:
A Fast Lithography Verification Framework for Litho-Friendly Layout Design. ISQED 2005: 169-174

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