"Fault Detection of Reactive Ion Etching Using Time Series Neural Networks."

Kyung-Han Ryu et al. (2006)

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DOI: 10.1007/11760191_56

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-12

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  dblp key:
  - conf/isnn/RyuLPPH06
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  - https://dblp.org/rec/conf/isnn/RyuLPPH06
Kyung-Han Ryu, Song-Jae Lee, Jaehyun Park, Dong-Chul Park, Sang Hong:
Fault Detection of Reactive Ion Etching Using Time Series Neural Networks. ISNN (2) 2006: 376-381

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