"Polynomial Neural Network Modeling of Reactive Ion Etching Process Using ..."

Seung Soo Han, Sang Hong (2006)

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DOI: 10.1007/11760191_152

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Seung Soo Han, Sang Hong:
Polynomial Neural Network Modeling of Reactive Ion Etching Process Using GMDH Method. ISNN (2) 2006: 1043-1052

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