"Die-level photolithography and etchless parylene packaging processes for ..."

Lin Li, Xiaowen Liu, Andrew J. Mason (2012)

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DOI: 10.1109/ISCAS.2012.6271781

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Lin Li, Xiaowen Liu, Andrew J. Mason:
Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors. ISCAS 2012: 2401-2404

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