"Impact of TSV on TDDB Performance of Neighboring FinFET with HK/IL Gate ..."

H. Zheng, Y. S. Sun, J. L. Huang (2022)

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DOI: 10.1109/IRPS48227.2022.9764467

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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H. Zheng, Y. S. Sun, J. L. Huang:
Impact of TSV on TDDB Performance of Neighboring FinFET with HK/IL Gate Stacking. IRPS 2022: 4

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