"SILC and TDDB reliability of novel low thermal budget RMG gate stacks."

Andrea Vici et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529347

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Andrea Vici, Robin Degraeve, Naoto Horiguchi, Ingrid De Wolf, Jacopo Franco:
SILC and TDDB reliability of novel low thermal budget RMG gate stacks. IRPS 2024: 1-6

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