"A defect characterization technique for the sidewall surface of Nano-ridge ..."

Abhitosh Vais et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405095

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Abhitosh Vais, Brent Hsu, Olga Syshchyk, Hao Yu, AliReza Alian, Yves Mols, Komal Vondkar Kodandarama, Bernardette Kunert, Niamh Waldron, Eddy Simoen, Nadine Collaert:
A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies. IRPS 2021: 1-5

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