"Enhanced DRAM Single Bit Characteristics from Process Control of Chlorine."

Taiuk Rim et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118042

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Taiuk Rim, Kyosuk Che, Sehyun Kwon, Jin-Seong Lee, Jeonghoon Oh, Hyodong Ban, Jooyoung Lee:
Enhanced DRAM Single Bit Characteristics from Process Control of Chlorine. IRPS 2023: 1-4

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