"Systematical study of 14nm FinFET reliability: From device level stress to ..."

Changze Liu et al. (2015)

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DOI: 10.1109/IRPS.2015.7112693

access: closed

type: Conference or Workshop Paper

metadata version: 2024-03-04

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Changze Liu, Hyun-Chul Sagong, Hyejin Kim, Seungjin Choo, Hyunwoo Lee, Yoohwan Kim, Hyunjin Kim, Bisung Jo, Minjung Jin, Jinjoo Kim, Sangsu Ha, Sangwoo Pae, Jongwoo Park:
Systematical study of 14nm FinFET reliability: From device level stress to product HTOL. IRPS 2015: 2

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