"Experimental Study on Effects of Boron Transient Enhanced Diffusion on ..."

Shuntaro Fujii et al. (2019)

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DOI: 10.1109/IRPS.2019.8720585

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Shuntaro Fujii, Isao Maru, Soichi Morita, Tsutomu Miyazaki:
Experimental Study on Effects of Boron Transient Enhanced Diffusion on Channel Size Dependences of Low Frequency Noise in NMOSFETs. IRPS 2019: 1-5

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