"Impact of spacer interface charges on performance and reliability of low ..."

Tadeu Mota Frutuoso et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405107

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Tadeu Mota Frutuoso, Jose Lugo-Alvarez, Xavier Garros, Laurent Brunet, Joris Lacord, Louis Gerrer, Mikaël Cassé, Edoardo Catapano, Claire Fenouillet-Béranger, François Andrieu, Fred Gaillard, Philippe Ferrari:
Impact of spacer interface charges on performance and reliability of low temperature transistors for 3D sequential integration. IRPS 2021: 1-5

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