"Electrostatic actuation of surface/bulk micromachined single-crystal ..."

Sangwoo Lee et al. (1999)

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DOI: 10.1109/IROS.1999.812820

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-30

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Sangwoo Lee, Sangjun Park, Sangwoo Yi, Sangchul Lee, Dong-Il Dan Cho, Byeoungju Ha, Yongsoo Oh, Cimoo Song:
Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators. IROS 1999: 1057-1062

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