"Piezoactuators for motion control from centimeter to nanometer."

Jean-Marc Breguet et al. (2000)

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DOI: 10.1109/IROS.2000.894652

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Jean-Marc Breguet, Ricardo Pérez, Arvid Bergander, Carl Schmitt, Reymond Clavel, Hannes Bleuler:
Piezoactuators for motion control from centimeter to nanometer. IROS 2000: 492-497

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