"Deposition of ALD-Molybdenum for Flash Memory Wordline Metallization."

Joshua Collins et al. (2025)

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DOI: 10.1109/IMW61990.2025.11026947

access: closed

type: Conference or Workshop Paper

metadata version: 2025-06-25

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Joshua Collins, Sanjay Gopinath, Kaihan Ashtiani, Shruti Thombare, Xiaolan Ba, Griffin Kennedy, Juwen Gao:
Deposition of ALD-Molybdenum for Flash Memory Wordline Metallization. IMW 2025: 1-4

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