"A non-destructive technique using 3D X-ray Computed Tomography to reveal ..."

C. H. Tan, C. K. Lau (2013)

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DOI: 10.1109/ICSIPA.2013.6707977

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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C. H. Tan, C. K. Lau:
A non-destructive technique using 3D X-ray Computed Tomography to reveal semiconductor internal physical defects. ICSIPA 2013: 55-60

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