"Shaped Objects: With Application to CZ Semiconductor Manufacture."

Vivek A. Sujan, Steven Dubowsky (1999)

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DOI: 10.1109/ROBOT.1999.772429

access: closed

type: Conference or Workshop Paper

metadata version: 2024-12-11

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Vivek A. Sujan, Steven Dubowsky:
Shaped Objects: With Application to CZ Semiconductor Manufacture. ICRA 1999: 951-956

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