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"Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si ..."
Sukhan Lee et al. (2001)
- Sukhan Lee, Jaewoo Chung, Seungmo Lim, Changseung Lee:

Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure. ICRA 2001: 616-619

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