"Distributed modeling and simulation of 300 mm fab intrabay automation ..."

Chung-Hsien Kuo, Chien-Sheng Huang (2003)

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DOI: 10.1109/ROBOT.2003.1241662

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Chung-Hsien Kuo, Chien-Sheng Huang:
Distributed modeling and simulation of 300 mm fab intrabay automation systems using distributed agent oriented petri nets. ICRA 2003: 616-621

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