"Investigation of Predictive Maintenance for Semiconductor Manufacturing ..."

Daniel Fischer, Patrick Moder, Hans Ehm (2021)

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DOI: 10.1109/ICIT46573.2021.9453481

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type: Conference or Workshop Paper

metadata version: 2022-04-09

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Daniel Fischer, Patrick Moder, Hans Ehm:
Investigation of Predictive Maintenance for Semiconductor Manufacturing and its Impacts on the Supply Chain. ICIT 2021: 1409-1416

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