"Impedance matching controller for an inductively coupled plasma chamber - ..."

Giorgio Bacelli, John V. Ringwood, Petar Iordanov (2007)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2007-07-11

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Giorgio Bacelli, John V. Ringwood, Petar Iordanov:
Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. ICINCO-SPSMC 2007: 202-207

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