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"Surface orientation dependence of ion bombardment damage during plasma ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Yukimasa Okada, Koji Eriguchi, Kouichi Ono (2015)

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DOI: 10.1109/ICICDT.2015.7165902

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  dblp key:
  - conf/icicdt/OkadaEO15
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  - https://dblp.org/rec/conf/icicdt/OkadaEO15
Yukimasa Okada, Koji Eriguchi, Kouichi Ono:
Surface orientation dependence of ion bombardment damage during plasma processing. ICICDT 2015: 1-5

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