"Composition of Metal Layers in CMOS-MEMS Micromachining Process."

Benito Granados-Rojas et al. (2019)

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DOI: 10.1109/ICEEE.2019.8884506

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, Luis Martín Flores-Nava, Griselda Stephany Abarca-Jimenez, Miguel Ángel Aleman-Arce, Yesenia Eleonor González-Navarro:
Composition of Metal Layers in CMOS-MEMS Micromachining Process. CCE 2019: 1-4

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