"Anisotropic silicon etch to house CMOS compatible MEMS microstructures ..."

Carlos Ramón Báez Álvarez et al. (2017)

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DOI: 10.1109/ICEEE.2017.8108843

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Carlos Ramón Báez Álvarez, Wilfrido Calleja Arriaga, Mónico Linares Aranda, Alfonso Torres-Jácome:
Anisotropic silicon etch to house CMOS compatible MEMS microstructures without planarization techniques. CCE 2017: 1-4

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