"Effect of changing the material and device's properties on the performance ..."

Carlos Ramón Báez Álvarez et al. (2013)

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DOI: 10.1109/ICEEE.2013.6676054

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  - https://dblp.org/rec/conf/iceee/AlvarezAAR13
Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Wilfrido Calleja Arriaga, Joel Molina Reyes:
Effect of changing the material and device's properties on the performance of polysilicon-based MicroActuators. CCE 2013: 415-420

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