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"Effect of the membrane flatness defect on the offset voltage of a silicon ..."
Zohir Dibi, Ali Boukabache, Patrick Pons (2003)
- Zohir Dibi, Ali Boukabache, Patrick Pons:

Effect of the membrane flatness defect on the offset voltage of a silicon piezoresistive pressure sensor. ICECS 2003: 902-905

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