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"DTCO for DSA-MP Hybrid Lithography with Double-BCP Materials in Sub-7nm Node."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Jiaojiao Ou et al. (2017)

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DOI: 10.1109/ICCD.2017.70

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
  - conf/iccd/OuXCYP17
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  persistent URL:
  - https://dblp.org/rec/conf/iccd/OuXCYP17
Jiaojiao Ou, Xiaoqing Xu, Brian Cline, Greg Yeric, David Z. Pan:
DTCO for DSA-MP Hybrid Lithography with Double-BCP Materials in Sub-7nm Node. ICCD 2017: 403-410

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