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"Discrete Event Control for the Automation of Reactive Sputter Plants."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Fabian Schneider, Alexander Fay, Christian Wölfel (2024)

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DOI: 10.1109/ICARCV63323.2024.10821598

access: closed

type: Conference or Workshop Paper

metadata version: 2026-04-15

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Fabian Schneider, Alexander Fay, Christian Wölfel:
Discrete Event Control for the Automation of Reactive Sputter Plants. ICARCV 2024: 131-138

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